Uploaded: 4th June 2014
AuthorA.H.SlocumAuthor, A.HondaAuthor, A.YuiAuthor, H.SaitoAuthor, T. KitajimaAuthor, X.Lu Download FileDevelopment of vertical-spindle rotary surface grinding machine for large-scale silicon-wafers –static stiffness of grinding spindle and worktable–
Home|Development of vertical-spindle rotary surface grinding machine for large-scale silicon-wafers –static stiffness of grinding spindle and worktable–