Development of a novel material measure for characterising instrument transfer function (ITF) considering angular-dependent asymmetries of areal surface topography measuring instruments

Uploaded: 6th June 2019

Author: Gaoliang Dai, Benedikt Seeger, Thomas Weimann, Weichang Xie, Dorothee Hüser, Rainer Tutsch

Metrology,Microscope,Nano technology,Surface

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