Uploaded: 27th May 2013
AuthorA. UneAuthor, K TakehanaAuthor, K. YoshitomiAuthor, M. Mochida Download FileDevelopment of a freezing pin chuck for polishing to fabricate a nonwarped substrate: Fixing characteristics to polish a quartz glass wafer
Home|Development of a freezing pin chuck for polishing to fabricate a nonwarped substrate: Fixing characteristics to polish a quartz glass wafer