An ultra-compact chromatic confocal sensing probe enabled by metasurfaces and micron resolution 3D printing

Author: James Williamson, Daniel Townend, Dawei Tang, Robert Owen, Wenbin Zhong, Andrew Henning, Haydn Martin, Varun Raj Konnanath Puthanveetil, Xiangqian Jiang

Metrology;Optical;Sensor

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