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Air Film Based Contactless Planar Positioning System with Sub-micron Precision

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J Eijk
J Spronck
J Wesselingh
R Ostayen
Air Film Based Contactless Planar Positioning System with Sub-micron Precision

Uploaded: 23rd May 2011

Author: J Eijk, J Spronck, J Wesselingh, R Ostayen

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