Uploaded: 4th June 2014
AuthorA. IsohashiAuthor, K. YamauchiAuthor, S. MatsuyamaAuthor, T. SugiuraAuthor, W. YamaguchiAuthor, Y. Sano Download FileA novel abrasive-free chemical planarization of oxide materials using pure water and Pt catalyst
Home|A novel abrasive-free chemical planarization of oxide materials using pure water and Pt catalyst