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A magnetically preloaded air bearing stage with 5-DOF motion error compensation

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B.K. Lee
G. Khim
J.K. Park
S.K. Ro
A magnetically preloaded air bearing stage with 5-DOF motion error compensation

Uploaded: 4th June 2014

Author: B.K. Lee, G. Khim, J.K. Park, S.K. Ro

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