Uploaded: 31st May 2010
AuthorG YangAuthor, I ChenAuthor, T TeoAuthor, W Lin Download FileA 3-DOF Spatial Motion Flexure-Based Parallel Manipulator with Large Workspace and High Payload for UV Nanoimprint Lithography Application
Home|A 3-DOF Spatial Motion Flexure-Based Parallel Manipulator with Large Workspace and High Payload for UV Nanoimprint Lithography Application