Performance of an X-Y-Theta actuator using piezoelectric elements and electropermanent magnets
Actuator;Mechatronic;Piezo-electric;Resolution
Multisensory and multiscale characterization of selected technological surfaces using optical methods
Measurement;Metrology;Roughness;Topography
Wafer warpage measurements by stitching lateral shearing interferometry
Interferometry;Measurement;Measuring instrument;Metrology
Investigation of the transferability of pulsed electrochemical machining process parameters from simple substitute models to complex manufacturing applications
Electro chemical machining (ECM);Fixture;Precision;Transfer
Lateral resolution enhancement of white light scanning interferometer
Interferometry;Measurement;Measuring instrument;Metrology
Assembly and evaluation of a spectrometer by using a spectral interferometer
Measurement;Measuring instrument;Metrology
Design and testing of an advanced honeybee waste heat-powered energy harvester
Design;Environmental;Monitoring
Study on effect of tool edge geometry on residual stress in metal cutting
Cutting;Finite element method (FEM);Residual stress