Novel hybrid interference and atomic force microscopy for in-situ reference areal surface metrology
Atomic force microscopy (AFM);Interferometry;Metrology;Topography
Atomic force microscopy (AFM);Interferometry;Metrology;Topography
Biomedical;Design;Injection;Mechanism
Accuracy;Dynamic;Piezo-electric;Positioning
Dynamic;Error;Machining;Robot
Cubic boron nitride (CBN);Face milling;Roughness;Super finishing
Adaptive control;Bearing;Diagnostics;Vibration
Accuracy;Algorithm;Computer automated;Control
Accuracy;Algorithm;Geometric modelling;Identification