Hybrid thermal error compensation model using mixed targeted assembly error models
Accuracy;Geometric modelling;Machine;Thermal error
Next Phase in ASML’s Digital Engineering: Modular-Swift-Precision Modelling
Digital;Finite element method (FEM);Modelling;Simulation
Ultrasonic Thermometry for Manufacturing Materials Using the Pulse-Echo Method
Manufacturing;Measurement;Temperature;Ultrasonic
Machine tool thermal state classification using LSTM models
Neural network;Thermal error
Data and mechanism fusion modeling approach for real-time prediction of spindle transient temperature field
Modelling;Spindle;Temperature;Thermal error
Multi-material optical mounts to mitigate thermal deformations – a topology optimization study
Composite;Design method;Optical;Optimisation
Thermal path optimization between cryocooler and sample
Cooling;Modelling;Resistance;Thermal conductivity
Characterisation of volumetric error variation with temperature
Calibration;Machine;Thermal error;Uncertainty
Model based drift compensation after sample load
Modelling;Thermal conductivity