Porous chuck without vacuum for wafer grinding and polishing
Grinding;Polishing;Wafer
Use of digital tools to simulate the accuracy of subtractive machining processes
Digital;Machining;Simulation
Measurement of rotation angle of a small mobile robot by measuring surface potential of insulators
Actuator;Mechatronic;Piezo-electric;Positioning
Shape memory alloy mechanical actuator with reduced commutation time
Actuator;Design;Mechanism;Shape memory alloy
Online-correction of the thermally induced Tool-Center-Point-deviation based on integrated deformation sensors
Machine;Sensor;Thermal error
OCT system for the detection of Subsurface damage in glass-substrates
Analysis;Classification;Interferometry;Metrology
Analysis of the Influence of Cutting Conditions on Surface Roughness of turning workpieces using a focus variation optical system
Machining;Optical;Roughness;Temperature
Machining characteristics of Ti6Al4V in ECM and hybrid laser-ECM
Electro chemical machining (ECM);Micromachining
Compensation of structure distortion in non-isothermal hot forming of laser structured thin glass
Forming;Glass;Laser micro machining;Sustainable development
Precision cutting of Ni-P plated large mold for X-ray mirror – The effect of tool positioning error on the workpiece form deviation
Cutting;Mold (or Mould);Precision;X-ray