Rectilinear translation four-bar flexure mechanism based on four Remote Center Compliance pivots
Conceptual design,Finite element method (FEM),Mechanism,Straightness
Conceptual design,Finite element method (FEM),Mechanism,Straightness
Force,Polishing,Predictive,Removal
Finishing,Microstructure,Mold (or Mould),Polishing
Compensation,Finite element method (FEM),Mechanism,Stiffness
Accuracy,Metrology,Performance
Spindle,Temperature,Thermal error
Fluid,Metrology,Thermal error,Workpiece
Analysis,Dynamic,Finite element method (FEM),Thermal error