Measurement-based loop shaping approach of feedback control for high performance direct drives incorporating friction behaviour of guides
Control,Drive,Friction,Measurement
Accuracy,Calibration,Measurement,Uncertainty
Mechanical,Nano manufacturing,Polymer,Tensile
Finite element method (FEM),Micromachining,Spindle,Vibration
Compensation,Optical,Robot,Roughness
Dynamic,Evaluation,Machine,Modelling
Kinematic,Parallel,Precision
Accuracy,Calcium fluoride,Coating,Micromachining,Ultra-precision
Accuracy,Analysis,Manufacturing (CAM),Cutting
Hardness,Measuring instrument,Nano indentation,Uncertainty