Investigations on the measurement precision of an atomic force microscope with an adjustable probe direction
Atomic force microscopy (AFM),Coordinate measuring machine (CMM),Measuring instrument
Atomic force microscopy (AFM),Coordinate measuring machine (CMM),Measuring instrument
Estimating,Finite element method (FEM),Methodology,Nano indentation
Electrical discharge machining (EDM),Electrode,Structural analysis,Surface
Diamond,Micromachining,Optical,Ultra-precision
Design,Microstructure,Sensor,Ultra-precision
Coordinate measuring machine (CMM),Design method,Finite element method (FEM),Ultra-precision
Calibration,Metrology,Microstructure
Positioning,Thermal error,Uncertainty