A new vacuum setup for fundamental investigations on interferometric length measurements
Dimensional,Interferometry,Laser,Optical
Dimensional,Interferometry,Laser,Optical
Coating,Friction,Injection,Molding (or Moulding)
Micromachining,Monitoring,Polishing,Sensor
Diamond,Error,Micromachining,Uncertainty
Computer aided design (CAD),Coordinate measuring machine (CMM),Learning,Metrology
Accuracy,Motion,Positioning,X-ray
Accuracy,Geometry,Manufacturing,Monitoring