Thermo-mechanical system modelling of a lithography high precision optics
Artificial intelligence,Compensation,Thermal error,Turning
Tackling thermal contacts between metal and glass estimation and measurement
Conceptual design,Error,Temperature
Thermal monitoring and adaptive compensation model based on proper orthogonal decomposition and optimal sensor placement.
Compensation,Grinding,Thermal error
Thermal Model of a Swiss-type Lathe
Control,Measuring instrument,Prototyping,Temperature