Hybrid thermal error compensation model using mixed targeted assembly error models
Accuracy;Geometric modelling;Machine;Thermal error
Next Phase in ASML’s Digital Engineering: Modular-Swift-Precision Modelling
Digital;Finite element method (FEM);Modelling;Simulation
Characterisation of volumetric error variation with temperature
Calibration;Machine;Thermal error;Uncertainty
Data and mechanism fusion modeling approach for real-time prediction of spindle transient temperature field
Modelling;Spindle;Temperature;Thermal error
Thermal path optimization between cryocooler and sample
Cooling;Modelling;Resistance;Thermal conductivity
Model based drift compensation after sample load
Modelling;Thermal conductivity
Hybrid thermal error compensation model using mixed targeted assembly error models
Accuracy;Geometric modelling;Machine;Thermal error
Next Phase in ASML’s Digital Engineering: Modular-Swift-Precision Modelling
Digital;Finite element method (FEM);Modelling;Simulation