Next Phase in ASML’s Digital Engineering: Modular-Swift-Precision Modelling
Digital;Finite element method (FEM);Modelling;Simulation
Digital;Finite element method (FEM);Modelling;Simulation
Cooling;Modelling;Resistance;Thermal conductivity
Calibration;Machine;Thermal error;Uncertainty
Modelling;Thermal conductivity
Accuracy;Compensation;Finite element method (FEM);Grinding
Compensation;Thermal error;Turning;Workpiece
Analysis;Mechanical;Modelling;Optical
Artificial intelligence;Simulation;Thermal error;Uncertainty