Modelling and identification of pre-sliding and sliding friction in ultra-high precision positioning systems euspen2018-04-04T14:07:40+00:00 Read More
Traceable characterisation of high-precision moving stages with displacement resolutions down to 10 pm euspen2018-04-04T14:07:41+00:00 Read More
Traceability of optical length measurements on sand surfaces euspen2018-04-04T14:07:41+00:00 Read More
Step-height measurements on sand surfaces: A comparison between optical scanner and coordinate measuring machine euspen2018-04-04T14:07:42+00:00 Read More
Optimisation of Workpiece Manipulation for Multimaterial Measurements in Industrial Computed Tomography euspen2018-04-04T14:07:42+00:00 Read More
Development of 3D form measurement of semiconductor structure ~ Measurement of FinFET profile using TEM and CD-SEM images ~ euspen2018-04-04T14:07:42+00:00 Read More