Reactive ion beam figuring for optical freeform surfaces
Finishing;Ion beam machining (IBM);Optical;Surface
Parallel alignment of stamp and substrate for UV-NIL process using loadcells
Alignment;Automation;Parallel
Influence of radial spindle error motions on the slot width when micro milling
Measurement;Micromachining;Milling;Spindle
Evaluation of Reinforcement Learning Approaches for Phase Control in Mid-air Ultrasonic Haptics
Actuator;Artificial intelligence;Haptic device;Ultrasonic