Integrated capacitive gap height sensing with aerostatic bearings and non-conductive guides
Measurement
Actuator;Mechatronic;Nonlinear;Piezo-electric
Grinding;Precision;Roughness;Surface
Actuator;Mechatronic;Piezo-electric;Positioning
Assembly;Bonding;Integration;Test
Electro chemical machining (ECM);Environmental;Oxidation;Polishing
Grinding;Silicon;Single crystal;Surface
Adaptive control;Control;Damping;Vibration
Artificial intelligence;Experimentation;Predictive;Tribology
Coating;Electro chemical machining (ECM);Microstructure;Surface