Investigation of shape measurement method for large-diameter silicon wafer with additional support euspen2018-04-04T14:00:36+00:00 Read More
An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry euspen2018-04-04T14:00:36+00:00 Read More
Precision measurement technique for rough surface object using self-beat signals of optical frequency comb euspen2018-04-04T14:07:48+00:00 Read More
Surface and thickness measurement of a transparent film using three-wavelength interferometry euspen2018-04-04T14:00:37+00:00 Read More
Wide-range precision displacement measurements by image analysis of diffraction light euspen2018-04-04T14:00:37+00:00 Read More
In-situ characterisation of the metrological properties of nanoindentation instruments euspen2018-04-04T14:00:37+00:00 Read More
In-stitu determination of the spring constant of soft AFM cantilevers using a MEMS nanoforce transducer euspen2018-04-04T14:00:38+00:00 Read More
