Mechanical resonance induced measurement uncertainty of ultra-precision on-machine surface measurement system
In-process measurement;Ultra-precision;Uncertainty;Vibration
In-process measurement;Ultra-precision;Uncertainty;Vibration
Control;Mechatronic;Performance;Uncertainty
Electro chemical machining (ECM);Micromachining
Accuracy;Burr;Drilling;Micromachining
Actuator;Control;Magnetic bearing;Micromachining
Diamond;Finishing;Laser;Polishing
Control;Dynamic;Estimating;Positioning
Diamond;Turning;Ultra-precision