Development of a Process for Stacking Planar Functional Materials with µm-overlay Accuracy euspen2018-04-04T14:05:41+00:00 Read More
High Precision Alignment and Packaging of Silicon Microsystems euspen2018-04-04T14:05:41+00:00 Read More
Manufacturing of a Hybrid Piezo-actuator for a Micro-diaphragm Pump by Micro Assembly Injection Moulding euspen2018-04-04T14:05:41+00:00 Read More
Micro Pin Fabrication by ECM with Ultra-low Concentration Electrolyte euspen2018-04-04T14:05:42+00:00 Read More
Atomic-scale Processing of Sputter-deposited Pt-Pd Alloy Film Surface Using AFM Diamond Tips euspen2018-04-04T14:05:42+00:00 Read More
Advanced Characterization of Free-form Surfaces in High Precision Machining euspen2018-04-04T14:05:43+00:00 Read More
Verification of the Square Foot Manufacturing Concept Through the Process of Micro Milling and Drilling with a Flexure Based Feed Unit euspen2018-04-04T14:05:43+00:00 Read More