Improvement of surface roughness by oblique cutting in diamond turning
Burr,Roughness,Turning,Ultra-precision
Burr,Roughness,Turning,Ultra-precision
Interferometry,Metrology,Nano technology,Optical
Actuator,Modelling,Ultra-precision,Wafer
Diamond,In-process measurement,Roughness,Wear
Hardness,Residual stress,Roughness,Surface
In-process measurement,Metrology,Monitoring,Production
Accuracy,Actuator,Hydrostatic,Sensor
End milling,Flow,Micromachining