Design of a nanometer-accurate air bearing rotary stage for the next generation nano-CT scanners euspen2018-04-04T13:59:28+00:00 Read More
ISO Compliant Reference Artefacts for the Verification of Focus Varation-based Optical Micro-co-ordinate Measuring Machines euspen2018-04-04T13:59:29+00:00 Read More
State-Of-The-Art X-Ray Optical Systems and their Fabrication euspen2018-04-04T13:59:30+00:00 Read More
Concept for a Miniaturized Machine-Tool-Module for the Manufacturing of Micro-Components Operated at its Resonance Frequency euspen2018-04-04T13:59:32+00:00 Read More
Validation of On-machine Microfeatures Volume Measurement Using Micro EDM Milling Tool Electrode as Touch Probe euspen2018-04-04T13:59:33+00:00 Read More
Fast Nanometer Positioning System by Combining Fast Resonant Mode and Accurate Piezostack Direct Drive euspen2018-04-04T13:59:33+00:00 Read More
FEM model based POD reduction to obtain optimal sensor locations for thermo-elastic error compensation euspen2018-04-04T13:59:34+00:00 Read More
Virtual CMM method applied to a spherical lens parameters calibration euspen2018-04-04T13:59:33+00:00 Read More
