Special Interest Group Meeting : Precision Motion Systems & Control

15th – 16th November 2022

Programme

Tuesday
Wednesday

Please note that all times are shown in Central European Time (CET)

Tuesday 15th November 2022

Time (CET)Programme
08:15 – 09:00Meeting Registration
09:00 – 09:10Welcome Address by Prof. José Yagüe-Fabra, University of Zaragoza, ES on behalf of euspen
09:10 – 09:40Keynote One: Active isolation platforms for scientific instruments
Prof. Christophe Collette, University of Liège, BE
09:40 – 10:20

 

Chair:

 

Session 1: Linear and angular actuators and measurement systems (Part 1)

 09:40     Hybrid tunable magnet actuator: Modeling and design
William Hoekwater, Delft University of Technology, NL  

 10:00     Multi-axis exactly-constrained mirror stages with peltier cooling for high-flux hard X-ray nanofocusing
Gabriel Moreno, Brazilian Synchrotron Light Laboratory – LNLS, BR 

10:20 – 10:50Coffee & Networking
10:50 – 11:50Session 1: Linear and angular actuators and measurement systems (Part 2)

 10:50    Operation and performance evaluation of vertical nanopositioners for 10 mm stroke in a 3D lift and tilt test setup
Steffen Hesse, IMMS Institute for Microelectronic and Mechatronic Systems, DE 

 11:10    The Fastjack – A robust, UHV compatible and high performance linear actuator
Thomas Dehaeze, ESRF, FR    

11:30     Precision control for gravitational wave detectors
Mathyn van Dael, Eindhoven University of Technology, NL  

11:50 – 12:05Debate and discussion on Linear and angular actuators and measurement systems
12:05 – 12:45Poster Session

Measurement capability verification of a large-range nanopositioning stage
Lucía Díaz-Pérez, University of Zaragoza, ES   

Zero dynamics, zero errors, zero compromise, with application to medical X-ray systems
Dennis Bruijnen, Philips Engineering Solutions, NL  

Piezo-based active damping and drift correction on a larger hexapod structure
Jonas Reiser, Physik Instrumente, DE    

Basis function feedforward for position-dependent systems
Max van Haren, Eindhoven University of Technology, NL   

Data-driven compensation of unmodeled dynamics for complex mechatronic systems – Part III: Control-relevant neural networks for feedforward
Leontine Aarnoudse, Eindhoven University of Technology, NL      

Comparison of single-beam and dual-beam differential interferometry for motion measurements in noisy environments
Vitalii Shmagun, TU Ilmenau, DE  

Design analysis of future deformable mirrors
Paul Tacx, Eindhoven University of Technology, NL 

Calibration of angular interferometers using electronic autocollimators for the determination of the Abbe errors’ uncertainty contributions
Rainer Köning, PTB Braunschweig, DE   

Advances in micro gap creation between form molds for thin-film replication of diffractive optical elements with strong curvature
Paul Kastl, Berlin Institute of Technology, DE  

High speed SMA actuation with sub-micrometer accuracy
Rolf Gaasbeek, Goodix Technology, NL   

Development of high-speed polygon-galvanometer scanning system supporting Micro-LED massive transfer
Xuexuan Li, Tsinghua University, CN    

Impulse disturbance rejection in adaptive feedforward control for an active vibration isolation system
Wouter Hakvoort, University of Twente, NL    

Digital twins for precision mechatronics: Predictive maintenance via fault detection and isolation
Koen Classens, Eindhoven University of Technology, NL  

Control strategies for nanometer precision in ultra precision 3D coordinate meausuring machines
Nard Strijbosch, IBS Precision Engineering, NL  

Spatial positioning correction for multi-axis nanopositioning stages
Graham Bartlett, Prior Scientific, UK    

Analysis of the influence of geometric and assembly errors in angular contact ball bearing spindles
Ibai Berrotaran, IDEKO, ES   

Reference tracking of distributed parameter system with input delay and disturbance compensation
André Heining, University of Stuttgart, DE      

Acceleration feedback control in fast tool servo freeform machining
Xichun Luo, University of Strathclyde, UK    

12:45 – 13:45Lunch & Networking
13:45 – 14:15State-of-the-Art: Process & IO syncronization for motion control
Brad Pedersen, OMRON, Neuhausen, CH
14:15 – 15:15

 

Chair:

 

Session 2: New approaches in control algorithms (Part 1)

14:15    Data-driven compensation of unmodeled dynamics for complex mechatronic systems – Part I: Position-dependent feedforward through Gaussian process regression
Johan Kon, Eindhoven University of Technology, NL  

14:35    Data-driven compensation of unmodeled dynamics for complex mechatronic systems – Part II: Combining models and neural networks
Maurice Poot, Eindhoven University of Technology, NL 

14:55     Reducing torque ripple and power consumption in switched reluctance motors: a systematic approach to commutation function design
Max van Meer, Eindhoven University of Technology, NL    

15:15 – 15:40Coffee & Networking
15:40 – 16:20Session 2: New approaches in control algorithms (Part 2)

15:40    Shaping nonlinearity in reset controllers for precision motion systems
Nima Karbasizadeh, Delft University of Technology, NL  

16:00    Hybrid integrator-gain systems: An overview of some recent results
Bardia Sharif, TU Eindhoven, NL   

16:20 – 16:35Debate and discussion on New approaches in control algorithms
16:35 – 17:55

 

Chair:

 

Session 3: Modelling and analysis of high performance mechatronics designs

16:35    Measurement-based loop shaping approach of feedback control for high performance direct drives incorporating friction behaviour of guides
Lukas Konietzny, Carl Zeiss SMT GmbH, DE     

16:55    State space controller for actuator control of an active jerk decoupled feed drive
Marcel-Frederic Böhse, Leibniz University Hannover, Institute of Production Engineering and Machine Tools (IFW), DE    

17:15    Model based design of a piezoelectric positioning system
Jose-Manuel Rodriguez-Fortun, Technological Institute of Aragon, ES  

17:35    Integrated controller-topology optimization for motion systems
Arnoud Delissen, Delft University of Technology, NL  

17:55 – 18:10Debate and discussion on Modelling and analysis of high performance mechatronics designs
18:30 –19:00Travel to Networking Dinner
19:00 –22:00Networking Dinner

Wednesday 16th November 2022

Time (CET)Programme
08:00 – 08:30Keynote Two: Experiences and perspectives in precision mechatronics
Prof. Dave Trumper, MIT, US
08:30 – 09:00State-of-the-Art: Advances in precision position measurement using interferometry
Vivek G. Badami / Peter J. de Groot, Zygo Corporation, US
09:00 – 10:00

 

Chair:

Session 4: Multi-axis positioning systems (Part 1)

09:00        Universal adjustment platform – standardization of 6 degrees of freedom adjustment systems design and integration
Mateusz Sosin, CERN, CH   

09:20         Cost-effective high-precision magnetically levitated positioning stage technology
Jos de Klerk, VDL ETG, NL  

09:40        Rotating MagLev sample manipulator
Ronald Faassen, MI-Partners, NL     

10:00 – 10:30Coffee & Networking
10:30 – 11:10Session 4: Multi-axis positioning systems (Part 2)

10:30        Diamond gnomiometer: Ultra stable goniometer
Jonathan Kelly, The Diamond Light Source LTD, UK   

10:50         A compliant continuously variable transmission mechanism
Ali Amoozandeh, Delft University of Technology, NL    

11:10 – 11:30Debate and discussion on Multi-axis positioning systems
11:30 – 12:10

 

 

Chair

Session 5: Vibration isolation and active damping systems

11:30        Development of a compact active vibration isolator for cryogenic conditions
Bart van Bree, JPE, NL   

11:50        Vibration suppression of a state-of-the-art wafer gripper
Manal El Ajjaj, TU Delft, NL   

12:10 – 12:20Debate and discussion on Vibration isolation and active damping systems
12:20 – 12:30Closing remarks by Prof. José Yagüe-Fabra, University of Zaragoza, ES
12:30 – 13:30Lunch & Networking
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