Tuesday 17th November 2026
| Time (CET) | Programme |
| 08:15 – 09:00 | Registration |
| 09:00 – 09:10 | Welcome Address by Dick Laro, MI-Partners, NL on behalf of euspen |
| 09:10 – 09:40 | Keynote 1: Controls co-design for the Einstein Telescope: Combining fast mechanical simulations with robust optimisers Dr Conor Mow-Lowry, Vrije Universiteit Amsterdam and Nikhef |
| Chair: Dick Laro | Session 1: Vibration isolation and robotic systems |
| 09:40 – 10:00 | SK1.01 Design & control of a Hybrid robot for 3D inspection Salomé Provost-Mattmann, Université Bourgogne Europe, FR (PMC26117) |
| 10:00 – 10:15 | S1.02 Performance-Oriented Active Vibration Control of Ultra-Hard Piezoelectric Mounts Aditya Natu, Delft University of Technology, NL (PMC26102) |
| 10:15 – 10:30 | S1.03 Precision Pointing Control of a 2-DOF SRM-Based Coarse Pointing Assembly Emre Deniz, TNO, NL (PMSC26135) |
| 10:30 – 10:45 | S1.04 Quantum measurement of torsional motion for gravity experiments Vivishek Sudhir, Massachusetts Institute of Technology, US (PMSC26132) |
| 10:45 – 11:05 | Discussion |
| 11:05 – 11:30 | Coffee & Networking |
| 11:30 – 12:00 | Keynote 2: Active vibration control in large scale machine tools Dr. Oier Franco, IDEKO, ES |
| Chair: Markus Hauf | Session 2: High dynamic positioning systems |
| 12:00 – 12:20 | SK2.01 Electrostatic Shear Clamp Concept for EUV Photolithography Stages Byron Seaberg, Massachusetts Institute of Technology, US (PMSC26130) |
| 12:20 – 12:35 | S2.02 Dynamic Error Budgeting-Based Optimization of Narrow-Band Multimode Active Vibration Control for an Industrial Wafer Gripper Aditya Natu, Delft University of Technology, NL (PMSC26106) |
| 12:35 – 12:50 | S2.03 A novel constrained layer damping concept for improved system dynamic performance Wietse Maas, ASML, Netherlands (PMSC26138) |
| 12:50 – 13:05 | S2.04 Development of a Passive Hydraulic Capsule for Mechanical Assistance in Scanning Photolithography Stages Byron Seaberg, Massachusetts Institute of Technology, US (PMSC26131) |
| 13:05 – 13:25 | Discussion |
| 13:25 – 14:25 | Lunch, Networking & Poster Viewing |
| Chair: Jens Flugge | Session 3: Multi-axis positioning systems (part 1) |
| 14:25 – 14:45 | SK3.01 Magnetically Levitated Planar Motor with Nanometer Precision Bert Kuijpers, Eindhoven University of Technology, NL (PMSC26118) |
| 14:45 – 15:00 | S3.02 Hybrid Three-Degree-of-Freedom Positioning System Using Ultrasonic and Electromagnetic Actuators Chenglong Ding, IFW Leibniz Universität Hannover, DE (PMC26104) |
| 15:00 – 15:15 | S3.03 Optical detection of registration marks with a laser focus sensor and the NPS6D200 nanopositioning system Steffen Hesse, IMMS GmbH, DE (PMSC26113) |
| 15:15 – 15:30 | S3.04 6-DoF pose measurement of a precision hexapod using digital holographic microscopy and the VERNIER library Victorien Lanneau, Institut FEMTO-ST, FR (PMSC122) |
| 15:30 – 15:50 | Discussion |
| 15:50 – 16:15 | Coffee & Networking |
| Chair: Jens Flugge | Session 3: Multi-axis positioning systems (part 2) |
| 16:15 – 16:30 | S3.05 Metrological characterization of a millimeter-range planar MagLev stage with sub-nanometer resolution for high-speed large-area atomic force microscopy Rudolf Krüger, Physik Instrumente (PI) GmbH & Co. KG, DE (PMSC26123) |
| 16:30 – 16:45 | S3.06 Design and Analysis of the 5-phase Planar Motor Evan Andersen, Andersen Electronic Design Ltd, CN (PMSC26126) |
| 16:45 – 17:00 | S3.07 Inverted Interferometric Stage Metrology for Large-Area Lithography Using Range-Resolved Interferometry Matthias Krojer, TU Ilmenau, DE (PMSC26127) |
| 17:00 – 17:15 | S3.08 Data-driven compensation of position-dependent disturbances: applied to a 6-DOF sample positioning stage Luuk van Sundert, Technical University of Eindhoven, NL (PMSC26129) |
| 17:15 – 17:35 | Discussion |
| 17:45 – 18:10 | Walk to Three Amigos restaurant (20 minute walk) |
| 18:15 – 21:00 | Networking Dinner |
Wednesday 18th November 2026
| Time (CET) | Conference Programme |
| 08:30 – 09:00 | Keynote 3: Prof. Hans Vermuelen, ASML & TU/e, NL |
| Chair: Jose Yague Fabra | Session 4: Mechatronic system architecture and designs |
| 09:00 – 09:20 | SK4.01 Precision Design and Control in Microphysiological Systems (Organs on Chips) David Trumper, MIT, US (PMC26136) |
| 09:20 – 09:35 | S4.02 Structure-preserving model reduction of modular high-precision systems Luuk Poort, MI-Partners, NL (PMC26121) |
| 09:35 – 09:50 | S4.03 Online Identification of Hysteresis Models for Condition Monitoring of Piezoelectric Actuators Tobias Herkner, Physik Instrumente (PI) SE & Co. KG, DE (PMC26107) |
| 09:50 – 10:05 | S4.04 Robust Control of Mechatronic Systems: A practical approach using the Nichols Plot and interpreting the Nyquist Criterion Lukas Konietzny, Carl Zeiss SMT GmbH, DE (PMC26108) |
| 10:05 – 10:20 | S4.05 Design and Validation of a Hybrid Tunable Magnet Actuator for Gravity Compensation in a 6-DoF Levitated Stage Nikai Verzijl, TU Delft, NL (PMC26111) |
| 10:20 – 10:35 | S4.06 Single-Phase Linear Motor-Driven Split Stage Architecture for High-Acceleration Photolithography Reticle Scanning Yoonsik Kwon, MIT, US (PMC26123) |
| 10:35 – 10:50 | Discussion |
| 10:50 – 11:40 | Coffee & Poster session |
| Chair: Sian Moxom | Poster pitch session (quick fire presentations next to your poster) P1.01 Competency Profiling and Production Planning Mechanism of Robotic Machining Incorporating CAD Integrated Cloud Manufacturing for Digital Twin; Abdullah All Mamun Anik, University of Huddersfield, UK (PMSC26101) P1.02 Force-Regulated Biaxial Loading for Quantitative Characterization of Vision-Based Tactile Sensors; Geming Chen, Jiangnan University, CN (PMSC26103) P1.03 A Free-Decay Oscillation Method for Hysteresis Characterisation in Precision Flexure Mechanisms; Diederik van Inzen, Fontys university of applied sciences, NL (PMSC26105) P1.04 System Identification for Precision Mechatronic Systems; Kai Karvinen, DE (PMSC26109) P1.05 Displacement Measurement and Anisotropy Investigations of Mineral Cast as a Base for Nanopositioning Systems; Ina Naujokat, IMMS GmbH, DE (PMSC26114) P1.06 Fusion of high precision planar Nanopositioning and tip-based Nanometrology; Jaqueline Stauffenberg, IMMS GmbH, DE (PMSC26116) P1.07 On the Influence of Flexible Modes on Rigid-Body Control: A Metric for Sensor–Actuator Configurations; Tobias Thoma, Carl Zeiss SMT GmbH, DE (PMSC26119) P1.08 Active Refractive Index Control for High-Precision Metrology; Sebastian Siebenhaar Technische Universität Ilmenau, DE (PMSC26 124) P1.09 Adaptive Control of Parallel Link Type Robot Machine Tool by Observing Cutting forces; Yoshitaka Morimoto, Kanazawa Institute of Technology, JP (PMS26125) P1.10 Design and analysis of a piezoelectric Z/tip/tilt manipulator with millimeter-level motion; Guangbo Hao, University College Cork, IRE (PMSC26128) P1.11 Modular voice-coil reaction force compensation for a pneumatically isolated long-stroke XY stage; Hyo-Young Kim, Tech University of Korea (TU Korea) KR (PMSC26137) |
| Chair: Dick Laro | Session 5: Linear, angular and position measurement systems |
| 11:40 – 11:55 | SK5.01 Robust Amplitude Control for Nanometre-Scale Oscillatory Motion in a Rolling Friction-Dominated Linear Stage Richard Albers, JPE, NL (PMSC26115) |
| 11:55 – 12:10 | S5.02 Realization and characteristics of an aerostatically guided nanopositioning axis for high-vacuum applications Ludwig Herzog, IMMS GmbH, DE (PMSC26110) |
| 12:10 – 12:25 | S5.03 Monolithic Position Measurement Interferometer Optimized for Electron Beam Applications Victor David, Keysight Technologies Inc., US (PMSC26112) |
| 12:25 – 12:40 | S5.04 Observer-Based Control of Flexible Modes for Over-Actuated Motion Systems Max Jans, MI-Partners, NL (PMSC26120) |
| 12:40 – 12:55 | S5.05 Design of a Direct‐drive Magnetic Wobble Motor for High‐Torque‐Density Low Power Applications Taryn Loutit, Massachusetts Institute of Technology, US (PMSC26134) |
| 12:55 – 13:15 | Discussion |
| 13:15 – 13:25 | Closing remarks, Dick Laro, MI Partners, NL |
| 13:25 – 14:00 | Lunch and distribution of Precision Fair tickets |