Special Interest Group Meeting: Micro/Nano Manufacturing 
28th – 29th November 2023


Our Special Interest Group meeting on Micro/Nano Manufacturing is held over 2 days and the daily programme is detailed below.

Please note that all times are shown in Central European Time (CET)


Tuesday 28th November 2023

Time (CET)Programme
08:30 – 09:45Tutorial: Principles of high-precision nano positioning
Dr.-Ing. Denis Dontsov, SIOS Meßtechnik GmbH, DE
09:45 – 10:00Coffee break
10:00 – 11:30Lab Tour: Nano-position Labs of TU Ilmenau
Time (CET)Programme
12:15 – 13:00Registration
13:00 – 13:10Welcome address by meeting chair: Dr Oltmann Riemer, LFM, University of Bremen, DE
13:10 – 13:20Welcome address from Local Host: Prof. Dr Stefan Sinzinger, Technische Universität Ilmenau, DE
13:20 – 13:50Keynote One: New perspectives in 3D micro-nanostructuring through the use of focused electron beams
Prof. Dr Steffen Strehle, Technische Universität Ilmenau, DE
13:50 – 15:10

Chair: Thomas Arnold


Session 1:  Micro & Nano Manufacturing Technologies & Applications

13:50     Development of G5 grade ceramic ball bearing using magnetic assited polishing and metal bond diamond grinding wheel
Tae-Soo Kwak, Gyeongsang National University, KR    

14:05     Amorphous silicon carbide as platform for DOEs with high and variable refractive index
Thomas Handte, Technische Universität Ilmenau, DE    

14:20     Reactive Ion Beam Figuring of Rapidly Solidified Aluminium  (RSA) 501
Florian Hölzel, Leibniz Institute of Surface Engineering (IOM), DE    

14:35     Self-standing process by using bimetallic effect of thin-film metallic glass
Shiyu Takenori, Nagoya University, JP   

14:50     Discussion

15:10 – 15:40Coffee & Networking
15:40 – 15:50Industry Presentations

  • SmalTec International
  • Polytec
15:50 – 16:15State-of-the-Art One: Challenges in modern intraocular lens manufacturing – from mass production to made-to-order
Dr Timo Eppig, AMIPLANT GmbH, DE
16:15 – 17:35

Chair: Oltmann Riemer


Session 2:  Machining Technologies for Moulds & Microparts

16:15    Crater identification of different pulse types in micro electrical discharge machining
Zequan Yao, KU Leuven, BE     

16:30    Fast-tool-servo diamond turning of free-form intraocular lenses from hydrophobic acrylic polymer
Wei Wang, Leibniz Institute for Materials Engineering IWT, DE    

16:45     Tribological potentials of PVD hard-coated micromilled microtextures
Pooria Azizabadi Farahani, IWT Bremen, DE      

17:00    Diamond machining of blazed grating on curved substrate
Nils Heidler, Fraunhofer Institute for Applied Optics and Precision Engineering, DE   

17:15     Discussion

18:30 – 21:30Networking Dinner at Hotel Gabelbach

Wednesday 29th November 2023

Time (CET)Programme
08:30 – 09:00Keynote Two: Trends and challenges in microoptics
Christof Pruss, University of Stuttgart, DE
09:00 – 10:20

Chair: Stefan Sinzinger

Session 3:   Metrology & Quality Control for Microparts

09:00      Precision-driven surface segmentation via neural networks
Weixin Cui, University of Huddersfield, UK    

09:15      Nanometrology and nanofabrication using a tip-based system combined with a planar nanopositioning machine (NFM-100)
Jaqueline Stauffenberg, TU Ilmenau, DE    

09:30      Tip- and laser- based micro and nanofabrication in extended areas on flat and non-flat surfaces
Eberhard Manske, TU Ilmenau, DE   

09:45      A compact zero-angle mirror alignment method based on range-resolved interferometry
Xinyu Chang, TU Ilmenau, DE       

10:00     Discussion

10:20 – 10:50Coffee & Networking
10:50 – 11:50

Chair: Denis Dontsov

Poster Session

P1.01     Proof of need for knowledge on cutting location for smart tool holders to estimate tool deflection
Shashwat Kushwaha, KU Leuven, BE

P1.02     Unconventional, lateral measurements with laser focus sensors for nanopositioning stages
Davi Anders Brasil, IMMS GmbH, DE     

P1.03     Irradiation characteristics of unidirectional magnetic field-applied fast atom beam source for surface-activated bonding
Kyosuke Oshima, Nagoya University, JP  

P1.04     Influence of injection moulding processing parameters on material acoustic properties for the manufacturing of polymer micro-acoustic-fluidic systems
Guido Tosello, Technical University of Denmark, DK  

11:50 – 12:50Lunch & Networking
12:50 – 13:15State-of-the-Art Two:   Beam-based ultra-precise surface processing
Dr Martin Ehrhardt, Leibniz Institute of Surface Engineering (IOM), DE
13:15 – 14:35

Chair: Guido Tosello

Session 4:   Micro Replication & Additive Techniques  (Part 1)

13:15      Optical design, development and manufacturing strategies for MEMS based pyroelectric infrared sensors
Thomas Geiling, Micro-Hybrid Electronics GmbH, DE     

13:30      Reproducible hot embossing process for the realization of functional parylene micro structures medical wearables
Franz Selbmann, Fraunhofer Institute for Electronic Nano Systems, DE

13:45      Creating superhydrophobic textures for microfluidic applications through a combination of femtosecond laser ablation and polymer injection moulding
Mian Monib ur Rehman, KU Leuven, BE   

14:00     Combined film extrusion and roller imprinting for large scale structuring of polymer films
Patrick Weiser, Karsruhe Institute of Technology, DE    

14:15     Discussion

14:35 – 15:00Coffee & Networking
15:00 – 15:30Session 4:   Micro Replication & Additive Techniques  (Part 2)

15:00      Process characterisation of soft-tooled micro-injection moulding through X-ray computed tomography and laser-scanning-confocal microscopy
Mert Gulcur, University of Warwick, UK   

15:15      Data-driven modelling towards the digital twin of micro injection moulding
Guido Tosello, Technical University of Denmark, DK

15:30     Discussion

15:40 – 15:50Closing remarks by Dr Oltmann Riemer, LFM, University of Bremen, DE
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