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Zygo Corporation
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Zygo Corporation
The turbulent history of interferometric methods of precision positioning
Distance,Interferometry,Measurement,Motion
Clare Nisbet
2022-11-25T09:36:23+00:00
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The turbulent history of interferometric methods of precision positioning
Distance,Interferometry,Measurement,Motion
Clare Nisbet
2022-11-11T10:37:53+00:00
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True-color 3D surface metrology for additive manufacturing using interference microscopy
David Billington
2018-04-04T13:57:06+00:00
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Heterodyne encoders for high-precision displacement measurement
euspen
2018-04-04T13:57:49+00:00
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