Design of Test Setup for Measurement of Microslip in Clamped Interfaces using a Balanced Heterodyne Interferometer with Picometer-ResolutionForce;Mechanical;Metrology;Stability Dishi Phillips2026-07-26T21:46:55+00:00 Read More
A novel approach to scanning probe metrology with 3D sensitivity euspen2018-04-04T14:00:33+00:00 Read More
Linking of multi-sensor measurement data for micropart measurements euspen2018-04-04T14:07:34+00:00 Read More