Tokyo Institute of Technology

|Tokyo Institute of Technology

Sensorless monitoring of machining torque on tilting platform driven by hybrid actuator

A newly developed nano-pattern generator equipped with an on-machine measuring function

Surface texture characterization of ultra-precision machined parts based on laser speckle pattern analysis

Structural Design of Long Range Sub-Nanometer Positioning System

A Hybrid Actuator-driven Compact Tilting Motion Table System for Multi-axis Ultra precision Machine Tool

A Newly Developed AFM-based Three Dimensional Profile Measuring System

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