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Tokyo Institute of Technology, Japan
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Tokyo Institute of Technology, Japan
A Newly Developed Ulptaprecision Machine Tool “ANGEL”
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euspen
2018-04-04T14:01:19+00:00
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Sub-Nanometer Positioning with a High Resolution Laser Interferometer
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euspen
2018-04-04T14:01:22+00:00
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Three-dimensional nano-positioning system for compact CMM
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euspen
2018-04-04T14:01:47+00:00
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