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Technische Universität Ilmenau, Germany
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Technische Universität Ilmenau, Germany
Precision control for ten decades cross-scale subnanometer positioning and measuring machines
Dimensional,Interferometry,Metrology,Ultra-precision
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Clare Nisbet
2020-11-23T13:06:36+00:00
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Solution Principles for the Metrology of very Small Torques with Minimized Relative Uncertainty
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euspen
2018-04-04T14:01:30+00:00
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Investigation of Opto-Mechanical Scanning Systems with the use of a Ray-Tracing Tool
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euspen
2018-04-04T14:01:47+00:00
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