Study on constant pressure machining of single crystal SiC with ruby spheres : Effect of machining speed
Ball;Ceramic;Machining;Silicon
Ball;Ceramic;Machining;Silicon
Fluid;Grinding;Image;In-process measurement
Grinding;Polishing;Wafer
Grinding,Turbine blade
Carbide,Machining,Silicon,Single crystal
Grinding,Machine,Sheet metal,Steel
Carbon,Electrical discharge machining (EDM),Grinding,Roughness
Lapping,Polishing,Profile,Simulation
End milling,Temperature