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IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH)
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IMMS Institut für Mikroelektronik- und Mechatronik-Systeme gemeinnützige GmbH (IMMS GmbH)
Development and validation of a simplified coil model for CFD simulation of a nano-positioning planar drive system
Dishi Phillips
2026-02-04T14:12:16+00:00
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