Ilmenau University of Technology

|Ilmenau University of Technology

Design of a Nanometre-precision Air Gap Control for Planar Magnetic Bearing Actuators

Ultra-precise linear motion generated by means of compliant mechanisms

Model Based Error Correction for Optical Aberrations in Laser Scanning Microscopes

Application of a novel fibre-coupled confocal sensor in a nanopositioning and nanomeasuring machine

Enhanced Optical Functionalities by Integrated Ultra-precision Machining Techniques

Experimental Investigation in the Friction Characteristics of High Precision Planar Ball Guides

Interferometry for the Next Generation of Nanopositioning and Nanomeasuring Machines

Design and Construction of a Laser Scanning Microscope for Surface Metrology

Recent Advances in 3-D Tactile Micro- and Nanometrology

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