Horiba France SAS

|Horiba France SAS

Assessment of microscopy moving stage performance down to the 10 nm range using encoded patterns with automated reading

Calibration,Coordinate measuring machine (CMM),Microscope,Positioning

Characterisation of a new three-dimensional absolute optical position sensor and investigation on position and axis errors of a precision bearing on nm and µrad scales.

Nano technology,Optical,Positioning,Sensor

Translate »