Hitach, LTD., Research & Development Group

Development of Magnet Array Movable Planar Magnetic Levitation Stage

Control,Magnetic bearing,Motion,Positioning

Clare Nisbet2023-06-01T10:17:45+00:00

Development of a Novel Maglev Stage System with Z-assist Actuation Mechanism

Magnetic bearing,Mechatronic,Positioning,Ultra-precision

Dishi Phillips2020-07-23T15:59:07+00:00

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