Friedrich-Alexander-Universität Erlangen-Nürnberg, Institute of Manufacturing Metrology

|Friedrich-Alexander-Universität Erlangen-Nürnberg, Institute of Manufacturing Metrology

Investigations on the measurement precision of an atomic force microscope with an adjustable probe direction

Atomic force microscopy (AFM),Coordinate measuring machine (CMM),Measuring instrument

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Precise measurement of large scale surfaces with micro-topographies without overlapping fields of view by white light interferometry

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