Optical fibre-coupled displacement and angle measurements using range-resolved interferometry
Interferometry,Measurement,Metrology,Optical
Interferometry,Measurement,Metrology,Optical
Interferometry,Measuring instrument,Metrology,Vibration
In-process measurement,Measurement,Precision,Ultra-precision
Interferometry,Measurement,Metrology,Optical
Metrology,Micromachining,Microscope,Modelling
Metrology,Micromachining,Microscope,Modelling
Dimensional,Interferometry,Measuring instrument,Optical