Chosun University

Wafer warpage measurements by stitching lateral shearing interferometry

Interferometry;Measurement;Measuring instrument;Metrology

Dishi Phillips2026-07-26T21:46:23+00:00

Lateral resolution enhancement of white light scanning interferometer

Interferometry;Measurement;Measuring instrument;Metrology

Dishi Phillips2026-07-26T21:46:23+00:00

Assembly and evaluation of a spectrometer by using a spectral interferometer

Measurement;Measuring instrument;Metrology

Dishi Phillips2026-07-26T21:46:23+00:00

Rapid step height measurements by polarized dual low coherence scanning interferometry

Inspection,Interferometry,Measurement,Optical

Clare Nisbet2023-06-01T10:23:44+00:00

Surface figure measurements using geometric phase shearing interferometer

Measurement,Measuring instrument,Metrology,Optical

Clare Nisbet2022-05-26T13:50:32+00:00

Imaging rotational motion sensor for real-time multiple object observation

Measurement,Measuring instrument,Metrology,Optical

Clare Nisbet2022-05-26T13:50:19+00:00

Measuring range extension of spectrally-resolved interferometry by using a polarization pixelated CMOS camera

Interferometry,Measurement,Measuring instrument,Metrology

Tarun Arora2021-09-21T06:20:13+00:00

Spatially phase-retarded spectroscopic ellipsometry

Measurement,Measuring instrument,Metrology,Optical

David Billington2018-08-17T13:37:38+00:00

Development of multi-channel optical sensor based on dispersive interferometry

euspen2018-04-04T14:08:09+00:00

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