Rapid step height measurements by polarized dual low coherence scanning interferometry
Inspection,Interferometry,Measurement,Optical
Surface figure measurements using geometric phase shearing interferometer
Measurement,Measuring instrument,Metrology,Optical
Imaging rotational motion sensor for real-time multiple object observation
Measurement,Measuring instrument,Metrology,Optical
Measuring range extension of spectrally-resolved interferometry by using a polarization pixelated CMOS camera
Interferometry,Measurement,Measuring instrument,Metrology
Spatially phase-retarded spectroscopic ellipsometry
Measurement,Measuring instrument,Metrology,Optical