Next Phase in ASML’s Digital Engineering: Modular-Swift-Precision Modelling
Digital;Finite element method (FEM);Modelling;Simulation
Digital;Finite element method (FEM);Modelling;Simulation
Digital;Finite element method (FEM);Modelling;Simulation
Reuse,Sustainable development
Actuator,Mechatronic,Precision
Spindle,Temperature,Thermal error
Identification,Mechatronic,Motion,Wafer
Control,Deformation,Observer,Temperature