A hydrogen valve enabling overlay and throughput for EUV
Actuator,Mechatronic,Precision
Thermal contact conductance in vacuum
Spindle,Temperature,Thermal error
A Multivariable Experiment Design Framework for Accurate FRF Identification of Complex Systems
Identification,Mechatronic,Motion,Wafer
Deformation-based control of a thermo-mechanical system
Control,Deformation,Observer,Temperature