Additive Manufacturing in ASML lithography machines: benefits and quality assurance

ASML Adopts a Circular Economy Model

Reuse,Sustainable development

A hydrogen valve enabling overlay and throughput for EUV


Thermal contact conductance in vacuum

Spindle,Temperature,Thermal error

Model Order Reduction of Large Thermal FEM models by Machine Learning Methods

A Multivariable Experiment Design Framework for Accurate FRF Identification of Complex Systems


Active control of thermal aberrations in projection optics for EUV Lithography

Deformation-based control of a thermo-mechanical system


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