ASML

|ASML

A hydrogen valve enabling overlay and throughput for EUV

Actuator,Mechatronic,Precision

Thermal contact conductance in vacuum

Spindle,Temperature,Thermal error

Model Order Reduction of Large Thermal FEM models by Machine Learning Methods

A Multivariable Experiment Design Framework for Accurate FRF Identification of Complex Systems

Identification,Mechatronic,Motion,Wafer

Active control of thermal aberrations in projection optics for EUV Lithography

Deformation-based control of a thermo-mechanical system

Control,Deformation,Observer,Temperature

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