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ASML Netherlands BV
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ASML Netherlands BV
High stiffness fixation and thermal insulation in a superconducting planar motor
Actuator,Conceptual design,Stiffness,Thermal conductivity
David Billington
2018-08-17T13:38:19+00:00
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Towards suitable multilayer pellicle architecture for application in high power EUV systems
euspen
2018-04-04T14:08:08+00:00
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