Special Interest Group Meeting: Micro/Nano Manufacturing 

Tutorial & Laboratory Tour

Tutorial: Principles of high-precision nano positioning

Tuesday 28th November 2023
Venue: Ernst-Abbe-Zentrum, Ehrenbergstraße 29, 98693 Ilmenau
Time: 08:30 – 11:30

The tutor is Dr.-Ing. Denis Dontsov, SIOS Meßtechnik GmbH, DE

Tutorial and Laboratory Tour Content

  • Metrological concepts for the nano position applications
  • Metrology for closed loop feedback
  • Usual arrangements and realizations
  • Known solutions
  • Lab tour of the Nano-position Labs of TU Ilmenau, IPMS

TU-Ilmenau LABs

Further information about the Nano-position TU Ilmenau LABs can be found HERE.

Tutor Biography

Denis Dontsov received his doctorate in 2003 from the Technical University of Ilmenau in the field of high precision laser vibrometry. He worked for the SIOS Messtechnik Ilmenau since 2002 in the R&D department. In the period from 2010 to 2016 he was a R&D Director of the company and since 2016 he is a CEO of the SIOS Messtechnik GmbH. His research activities lie in particular in the development of metrological devices based on the laser interferometer technology in particular nanopositioning and nanomeasuring machines and ultra-stable laser interferometers.

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