Special Interest Conference: Micro/Nano Manufacturing and AET Symposium in ACSM and Digital Manufacturing
17th – 19th September 2025
Programme
Our Special Interest Conference on SIC Micro/Nano Manufacturing and AET Symposium in ACSM and Digital Manufacturing is held over 3 days and the daily programme is detailed below.
Please note that all times are shown in Central European Summer Time (CEST)
Wednesday 17th September 2025
| 08:30 – 09:00 | Registration |
| 09:00 – 09:10 | Welcome address by meeting chairs: Prof. Nabil Anwer, Paris-Saclay University, FR and Dr Oltmann Riemer from LFM (Bremen) |
| 09:10 – 09:20 | Welcome address by AET Vice-President, Prof Lihui Wang, KTH Royal Institute of Technology |
| 09:20 – 09:50 | Keynote 1: Current Status and Future Outlook in Atomic-Scale Processing Prof. Dr Fred Roozeboom, Faculty of Science & Technology, University of Twente, NL |
| 09:50 – 10:10
Chair:
| Session 1: ACSM 09:50 Session Keynote: Preliminary introduction to atomic and close-to atomic scale manufacturing, Xichun Luo, University of Strathclyde 10:10 Two-Photon Laser Oxidation as a Promising Technique for Area-Selective ALD on Graphene: A Review of Surface Modification Approaches, Atiye Khosravi, Strathclyde University 10:25 Deformation behaviour of monocrystalline silicon under AFM dynamic lithography, Yang He, University College Dublin 10:40 Discussion |
| 10:55 – 11:10 | Coffee & Networking |
| 11:10 Atomic Features Characterisation using Conductive Atomic Force Microscopy under Ambient Condition at Atomic and Close-to-atomic Scale, Wenhao Zhang, University College Dublin 11:25 Atomic Layer Etching: A Review, Hifza Hafeez, University of Strathclyde 11:40 Manufacturing of silicon dioxide nanodots using rolling nanoelectrode lithography Zhengjian Wang, University of Strathclyde 11:55 Discussion 12:10 Exhibitor presentations | |
| 12:25 – 13:30 | Lunch |
| 13:30 – 14:00 | Keynote 2: Achieving atomically smooth diamond substrates by plasma-assisted polishing Prof. Kazuya Yamamura, Research Center for Precision Engineering, Graduate School of Engineering, The University of Osaka, Japan |
| 14:00 – 15:25
Chair:
| Session 2: Micro and Nano Machining 14:00 Session Keynote: Effect of near-surface gas flow on surface roughness in atmospheric plasma chemical vaporization machining, Xinyang Wei, University of Osaka 14:20 Investigation of Ultrasonic Vibration-assisted Polishing of Reaction-Sintered Silicon Carbide, Zhichao Geng, University College Dublin 14:35 Reactive Ion Beam Figuring of optical materials, Thomas Arnold, Leibniz-Institut für Oberflächenmodifizierung 14:50 Atomic-Level Stress-Free Precision Machining of Fused Silica via Electrochemically Induced Chemical Etching, Sizhou Chen, Dalian University of Technology 15:05 Discussion |
| 15:25 – 15:40 | Coffee & Networking |
| Session 3: Metrology 15:40 Advancements in Scanning Probe Microscopy for Characterizing Solar Cell Materials, Chuanxiao Xiao, Ningbo Institute of Materials Technology and Engineering 15:55 High-speed lateral-scanning white-light interferometry with vertical off-axis compensation, Hang Zhao, Huazhong University of Science and Technology 16:10 The Molecular Dynamics Simulation of the Damage Mechanism of Ni/Graphene Composite Dynamic Sealing Layer, Yongbo Guo, Harbin Institute of Technology 16:25 Design of Triaxial Robust Repetitive Control for Fast Atomic Force Microscopy Imaging 16:40 Discussion 17:00 A Point Cloud Analysis-Based Surface Characteristic Method for Directed Energy Deposition (DED) Additive Manufacturing, Hao Xue, University of Edinburgh 17:15 Mating Surface Contact Behavior Analysis and Assembly Accuracy Prediction for Precision Mechanical Products, Nan Shao, Paris-Saclay Universite 17:30 Design of an Abbe Error Free Three-Dimensional Coordinate Measuring Machine, Ali Rugbani, Cape Peninsula University of Technology, CPUT 17:45 On the use of B-spline reconstruction for roughness evaluation of complex profiles, Ahmed Bachir, LNE 18:00 Discussion | |
| 18:20 | Close – free evening |
Thursday 18th September 2025
| Time (CEST) | Programme |
| 08:30 – 09:00 | Keynote 3: Adaptive laser writing for three-dimensional precision fabrication of functional devices Prof. Martin Booth, University of Oxford, UK |
| 09:00 – 09:30 | Keynote 4: Electrospinning of Intelligent and Sustainable Materials Prof Seeram Ramakrishna, National University of Singapore, Singapore |
| 09:30 – 12:30
Chair: | Session 4: Ultra Precision Manufacturing 09:30 Session Keynote: Pattern transfer by atmospheric pressure plasma jet etching for manufacturing hybrid optical elements, Thomas Arnold, Leibniz-Institut für Oberflächenmodifizierung 09:50 Exploring nano/atomic scale removal mechanism of semiconductor materials in energy field assisted ultra-precision machining, Benny C.F. Cheung, The Hong Kong Polytechnic University 10:05 Optimal Model-Free Iterative Learning Control of Fast Tool Servo for Real-Time Turning Toolpath Tracking of Freeform Surfaces, Wei-Wei Huang, Shanghai Jiao Tong University 10:20 Temperature-Dependent Machinability of Optical Polymers in Diamond Turning, Wei Wang, Leibniz Institute for Materials Engineering IWT 10:35 Discussion |
| 10:55 – 11:10 | Coffee & Networking |
| 11:10 Insights into the atomic-scale removal mechanism of SiC in plasma-assisted polishing, Congyue Luo, Zhejiang University of Technology 11:25 High-Efficiency Force Rheological Polishing of Hemispherical Resonator Inner Stem, Tao Zhou, Zhejiang University of Technology 11:40 Research on high-efficiency ultra-precision polishing technology of resonant oscillator lip edge, Feng Yingchao, Zhejiang University of Technology 11:55 Achieving ultra-smooth and damage-free surface on deep structure through understanding the material removal mechanism of the modification layer, Haixiang Hu, Changchun Institute of Optics 12:10 Discussion | |
| 12:30 – 13:30 | Lunch |
| Session 4: Ultra Precision Manufacturing (cont.) 13:30 Compact piezo-driven inchworm rotary mechanism for LISA Space mission, Narendra Mahavar, KU Leuven 13:45 Ultra-precision Fly Cutting and Nano-imprinting of Sub-Micron Gratings for AR/VR Applications, Vinod Mishra, CSIO-CSIR 14:00 Thermal stability analysis and optimization of field-assisted diamond turning, Kaiyuan You, University of Electronic Science and Technology of China 14:15 Discussion | |
| Session 5: Digital Technology for Precision Manufacturing 14:30 Fabrication of Micro-Structured Ceramic Artificial Hip Joints via Digital Twin-Enhanced Ultra-Precision Grinding, Zhenfei Guo, Harbin Institute of Technology & University College Dublin 14:45 Characterization and experimental study of electromechanical coupling of ball screw servo feeding system, Haitao Liu, Harbin Institute of Technology 15:00 Electrode shape wear prediction in micro-edm with machine learning, Jia Ge, University College Dublin 15:15 Discussion | |
| 15:30 – 15:45 | Coffee & Networking |
| 15:45 Comparing state-of-the-art 2PP to competing processes – a take on precision, accuracy and throughput, Georg Winkler, UpNano GmbH 16:00 Simulation-Driven Design of Ultrasonic Horns for Precision Micro-Grinding Applications, Rajeshkumar Madarkar, Buckinghamshire New University 16:15 On the use of Virtual Image Correlation methods to enhance accuracy in contour identification using X-ray computed tomography data, Filippo Mioli, University of Padova 16:30 Robust Salvinia-inspired superhydrophobic surfaces on hydrophilic materials via two photon polymerization, Kai Liu, University of Padova 16:45 Discussion | |
| 17:05 – 17:30 | Session 6: Poster session for poster pitch presentations P6.01. Molecular dynamics study of 4H-SiC indentation deformation mechanism, Zhongwei Hu, Huaqiao University (MNAET25143) P6.02. The effect of grinding speed on the deformation mechanism of single crystal gallium nitride studied by nanoscratching, Yueqin Wu, Huaqiao University (MNAET25144) P6.03. Unveiling the Anisotropic Deformation Mechanisms of β-phase Gallium Oxide, Xipeng Xu, Huaqiao University (MNAET25149) P6.04. Theoretical Study on High-Precision Optical Manipulation Based on a Novel Optical Force Device, Chunyang Gu, Chinese Academy of Sciences (MNAET25151) P6.05. Enhancement of Irradiation Performance in Fast Atom Beam Source with Internal Electrode, Taichi Hino, Nagoya University (MNAET25154) P6.06. Multi-channel wide spectrum high resolution spectrometer for thin film thickness measurement, Bosong Duan, Zhejiang University (MNAET25157) P6.07. Challenges in Manufacturing and Measuring Microstructures with Re-Entrant Features Using Two-Photon Polymerization and Micro-CT, Tomasz Bartkowiak, Poznan University of Technology (MNAET25158) P6.08. Nano-cutting fluids based on graphene nanoparticles for deep hole drilling under MQL conditions, Roberto Teti, Franhofer, University of Naples Federico II (MNAET25159) P6.09. Off-axis Wavefront Measurement for Defocus Lens Design, Chenhua Zhang, University College Dublin (MNAET25161) P6.10. Nanoscale Film Formation via Dilute Solution Spin Coating: Exploring the Thickness Limit and Uniformity, Qiuyu Liu, Dalian University of Technology (MNAET25163) P6.11. Holographic mask fabrication by photoelectrochemical etching, Pan Peng, Huazhong University of Science and Technology, China (MNAET25133) P6.12. Generation of robust algorithms for dense image matching in dimensional metrology, Ladji Fofana, LNE (MNAET25172) P6.13. A polishing process simulated using molecular dynamics to explain atomic-level origins in machine tool processing, Baozhen Li, GENERTEC Machine Tool Engineering Research Institute CO., LTD. Beijing (MNAET25184) P6.14. Deep learning-assisted measurement system for the 3D profiles of inner surfaces of components, Xiangyu Zhao, Huazhong University of Science and Technology (MNAET25124) P6.15. Selective Laser Melted Porous CuSn20-Bonded Diamond Grinding Tool: Functional Cellular Structures Design, Service Performance Evaluations and Properties Tailoring Database Establishment, Yangli Xu, Huaqiao University (MNAET25136) P6.16. Enhanced Interferometric Measurement of Discontinuous Surfaces: Improved Morphology – based Phase Unwrapping Algorithm P6.17. Synergistic modulation of corrosion and tribological performance of MoS2 coatings based on chemical annealing and Ti doping P6.18. Investigation of the Effects of LaB6 Microparticles on the Laser Powder Bed Fusion of Copper: Printability, microstructure and properties, Yanlong Cao, Zhejiang University (MNAET25146) P6.19. A Concept for Making Molds for the Replication of Parts with Combined Micro- and Submicro-Structured Surface P6.20. Development and Application of Large-Scale and High-Precision Gratings, Wenhao Li, Changchun Institute of Optics (MNAET25191) P6.21. In-process monitoring and servo control with cost-effective radio frequency (RF) signal in micro-EDM, Zequan Yao, KU Leuven (MNAET25193) P6.22. Dimensional nanometrology and sub-nanometre positioning using X-ray interferometry, Andrew Yacoot, NPL (MNAET25194) |
| 17:30 – 17:45 | Free time with posters |
| 17:45 – 18:00 | Close Day 2 – Coaches depart for networking dinner Transport provided one way to restaurant |
| 19:00 – 22:00 | Networking Dinner at Bouillon Racine |
Friday 19th September 2025
| Time (CEST) | Programme |
| 08:30 – 09:00 | Keynote 5: Advanced fabrication technologies for scaling optical micro- and nano-structures to application relevant areas Professor Dr. U.D. Zeitner, Senior Director, Opto-Mechanical Systems, Fraunhofer |
| 09:00 – 13:00 | Session 7: Micro-manufacturing 09:00 Session Keynote: Micro-Injection Molding of TPU for medical devices: Material influence on dimensional accuracy and surface quality. Maria del Angel Guerrero, ITESM 09:20 Modular Assembly and Mechanical Validation of Hollow Polymeric 3D Microneedle Array Devices (3DMA) for Scalable Transdermal Drug Delivery, Lorcan O’Toole, MNMT-Dublin 09:35 Improvement of irradiation performance in fast atom beam source with bidirectional magnetic field for surface activated bonding, Yuki Miyoshi, Nagoya University 09:50 Evaluating the Impact of Internal Structural Defects on Fatigue Performance in Polylactic Acid Components Manufactured via Fused Deposition Modeling, Liang Wang, Beijing Institute of Technology 10:05 Two-Photon Polymerization for Advanced Calibration Artefacts in Optical Areal Metrology, Julian Hering-Stratemeier, University of Kaiserslautern-Landau 10:20 Discussion |
| 10:45 – 11:00 | Coffee & Networking |
| 11:00 Enhanced Hot-Embossing of Submicrometric Structures in Polymers for Optofluidic Applications, Thomas Guenther, (IFM), University of Stuttgart 11:15 Defect-free replication of polymeric micro structures using novel Ni-PTFE nanocomposite moulds, Tianyu Guan, University College Dublin 11:30 High-resolution master fabrication for tool-based manufacturing using two photon lithography, Manuel Luitz, UpNano GmbH 11:45 Discussion | |
| 12:00 Femtosecond-laser-fabricated interfacial microrobots for versatile non-contact applications, Bowen Chen, University of Science and Technology of China 12:15 Investigation on Mechanism of Starch-based Ultra Stable Foam for Potential Application of Sprayable Mulch Film, Huifang Xie, Henan Academy of Sciences, Institute of Chemistry 12:30 New challenges faced by high-precision laser manufacturing of 3D components with complex shape: up-scaling inspection methodologies for control dimensions, a real case study, Eva Rodriguez, Tekniker 12:45 Discussion | |
| 13:00 – 14:00 | Lunch |
| 14:00 – 15:00 | Universite Paris-Saclay laboratory tour |
| 15:00 – 15:20
| Closing remarks Prof Kornel Ehmann AET President, Northwestern University Announcement of next AET event: Prof. Kazuya Yamamura, Research Center for Precision Engineering, Graduate School of Engineering, The University of Osaka, Japan Dr. Oltmann Reimer (euspen) and Prof. Nabil Anwar (local host) CONFERENCE ENDS |