Irradiation characteristics of unidirectional magnetic field-applied fast atom beam source for surface-activated bonding

Uploaded: 29th November 2023

Author: Kyosuke Oshima, Wataru NOMURA, Taisei Kato, Chiemi OKA, Junpei SAKURAI, Seiichi HATA

Bonding,Etching,Vacuum,Wafer

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