Advances in micro gap creation between form molds for thin-film replication of diffractive optical elements with strong curvature

Uploaded: 16th November 2022

Author: Paul Kastl, Stefan Kühne, Daniel Rolon, Marco Jagodzinski, Markus Malcher, Johannes Wolf, Gabi Grützner, Dirk Oberschmidt, Thomas Krist

Accuracy,Control,Hexapod

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