Model based design of a piezoelectric positioning system
Control,Model,Piezo-electric,Positioning
Control,Model,Piezo-electric,Positioning
Control,Dynamic,Motion,Optimisation
Control,Magnetic bearing,Measurement,Positioning
Control,Design method,Feedback,Mechatronic
Accuracy,Engineering,Motion,Stability
Actuator,Development,Positioning,Ultra-precision
Actuator,Alignment,Motion,Positioning
Actuator,Interferometry,Piezo-electric,Vacuum