Next Phase in ASML’s Digital Engineering: Modular-Swift-Precision Modelling
Digital;Finite element method (FEM);Modelling;Simulation
Digital;Finite element method (FEM);Modelling;Simulation
Calibration;Machine;Thermal error;Uncertainty
Modelling;Spindle;Temperature;Thermal error
Cooling;Modelling;Resistance;Thermal conductivity
Modelling;Thermal conductivity
Accuracy;Geometric modelling;Machine;Thermal error
Actuator,Alloy,Glass,Sensor
Manufacturing (CAM),Material,Turning,Ultra-precision