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Berlin Institute of Technology, department of Micro and Precision Devices MFG
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Berlin Institute of Technology, department of Micro and Precision Devices MFG
Parallel alignment of stamp and substrate for UV-NIL process using loadcells
Alignment;Automation;Parallel
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Dishi Phillips
2025-08-27T20:23:15+00:00
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Advances in micro gap creation between form molds for thin-film replication of diffractive optical elements with strong curvature
Accuracy,Control,Hexapod
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Clare Nisbet
2022-11-11T10:37:53+00:00
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